Integrated circuits are generally built on Silicon or Gallium Arsenide wafer bases and include a large number of different components, such as transistors, capacitors and other electronic devices that are connected by multiple layers of wiring, or interconnects.

Regardless of whether an integrated circuit is made with copper or aluminum, the manufacturing process steps must be repeated many times: advanced chip designs may require as many as 500 process steps.

Controlling the temperature of the substrate in the respective chamber to within 0.5°C is possible using 3M Fluorinert® Electronic Liquids. 

3M’s new Novec® Engineered Fluids provide the same superb temperature control as Fluorinert however with a much-improved Environmental profile and significantly lower Global Warming Potential.

Fluorinert™ and Novec working fluids have an added advantage over water and water/glycol mixtures in that they do not support biological growth.  Additionally, in the unlikely event that a leak should occur, their incredibly high dielectric properties do not damage the wafers or other electronics in the process.

Common Uses:

• Semiconductor Chillers  (-90°c to +215°C)
• Semiconductor Etch /Ash / Implant
• For all Poly, Trench, Dielectric, Metal, Nitride and Low-k etch applications for 200mm and 300mm wafers.
• Thin Film Processes
• Chemical Vapor Deposition (CVD) / PVD
• Other Thermal Control Systems
• Lasers /Photonics
• Medical / Pharmaceutical
• Military / Aerospace
• Analytics and Instrumentation

Why AMS Materials?
AMS Materials has worked with all the major tools and chillers and we can help you select the proper thermal management fluid for your particular use.  Via our exclusive relationship with 3M, you get more than a terrific product—you also have global access to a wealth of knowledge and value-added services that help keep your equipment up and running at peak efficiency.