3M’s Novec® Engineered Fluids provide the same superb temperature control as Fluorinert however with a much-improved Environmental profile and significantly lower Global Warming Potential.

Fluorinert™ and Novec working fluids have an added advantage over water and water/glycol mixtures in that they do not support biological growth.  Additionally, in the unlikely event that a leak should occur, their incredibly high dielectric properties do not damage the wafers or other electronics in the process.

Common Uses:

• Semiconductor Chillers  (-90°c to +215°C)
  • Semiconductor Etch /Ash / Implant
    • For all Poly, Trench, Dielectric, Metal, Nitride and Low-k etch applications for 200mm and 300mm wafers.
  • Thin Film Processes
  • Chemical Vapor Deposition (CVD) / PVD
• Other Thermal Control Systems
  • Lasers /Photonics
  • Medical / Pharmaceutical
  • Military / Aerospace
  • Analytics and Instrumentation